JPH0546785B2 - - Google Patents

Info

Publication number
JPH0546785B2
JPH0546785B2 JP86122431A JP12243186A JPH0546785B2 JP H0546785 B2 JPH0546785 B2 JP H0546785B2 JP 86122431 A JP86122431 A JP 86122431A JP 12243186 A JP12243186 A JP 12243186A JP H0546785 B2 JPH0546785 B2 JP H0546785B2
Authority
JP
Japan
Prior art keywords
phase
stator
protrusions
electromagnets
lattice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP86122431A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6289467A (ja
Inventor
Nagahiko Nagasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Publication of JPS6289467A publication Critical patent/JPS6289467A/ja
Publication of JPH0546785B2 publication Critical patent/JPH0546785B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K15/00—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
    • G06K15/22—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using plotters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Linear Motors (AREA)
JP61122431A 1985-06-25 1986-05-28 サ−フエイスパルスモ−タ Granted JPS6289467A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60-137018 1985-06-25
JP13701885 1985-06-25

Publications (2)

Publication Number Publication Date
JPS6289467A JPS6289467A (ja) 1987-04-23
JPH0546785B2 true JPH0546785B2 (en]) 1993-07-14

Family

ID=15188902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61122431A Granted JPS6289467A (ja) 1985-06-25 1986-05-28 サ−フエイスパルスモ−タ

Country Status (4)

Country Link
US (1) US4706007A (en])
EP (1) EP0207353B1 (en])
JP (1) JPS6289467A (en])
DE (1) DE3678045D1 (en])

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8804991D0 (en) * 1988-03-02 1988-03-30 Williams Fairey Eng Ltd Improvements in electric motors
US4888481A (en) * 1988-12-19 1989-12-19 Ncr Corporation Aligning and protective cover for a motor
US5081593A (en) * 1989-08-16 1992-01-14 Megamation Incorporated Method and apparatus for monitoring and controlling linear motor robot apparatus and the like
WO1991004835A1 (fr) * 1989-10-03 1991-04-18 Kabushiki Kaisha Yaskawa Denki Seisakusho Manipulateur utilisant un moteur pas a pas de type plat
US5015622A (en) * 1989-10-17 1991-05-14 Alfred University Multidirectional/rotational superconductor motor
JPH09168275A (ja) * 1995-12-15 1997-06-24 Mitsubishi Heavy Ind Ltd 多自由度電動機
AU8037098A (en) * 1997-07-18 1999-02-10 Nikon Corporation Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device
US6147421A (en) * 1998-11-16 2000-11-14 Nikon Corporation Platform positionable in at least three degrees of freedom by interaction with coils
US6208045B1 (en) 1998-11-16 2001-03-27 Nikon Corporation Electric motors and positioning devices having moving magnet arrays and six degrees of freedom
AT409043B (de) * 2000-02-07 2002-05-27 Heinz Peter Dipl Brandstetter Vorrichtung und verfahren zur zweidimensionalen positionsbestimmung
US6452292B1 (en) 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US6445093B1 (en) 2000-06-26 2002-09-03 Nikon Corporation Planar motor with linear coil arrays
JP4702083B2 (ja) * 2006-02-10 2011-06-15 ウシオ電機株式会社 ＸＹθ移動ステージ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3376578A (en) * 1966-05-31 1968-04-02 Bruce A. Sawyer Magnetic positioning device
US3457482A (en) * 1967-10-30 1969-07-22 Bruce A Sawyer Magnetic positioning device
US3735231A (en) * 1971-06-28 1973-05-22 B Sawyer Linear magnetic drive system
JPS52523B2 (en]) * 1972-05-25 1977-01-08
JPS58175020A (ja) * 1982-04-05 1983-10-14 Telmec Co Ltd 二次元精密位置決め装置
JPS5956888A (ja) * 1982-09-22 1984-04-02 Tokyo Erekutoron Kk 二次元駆動装置

Also Published As

Publication number Publication date
EP0207353B1 (en) 1991-03-13
EP0207353A1 (en) 1987-01-07
JPS6289467A (ja) 1987-04-23
DE3678045D1 (de) 1991-04-18
US4706007A (en) 1987-11-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees